MEMS Testing

Technical Activity Committee on MEMS Testing

TAC Co-Chair:  Ronald D. BLANTON,

Microelectromechanical systems (MEMS) are miniature electromechanical sensor and actuator systems developed from the mature batch-fabricated processes of VLSI technologies. MEMS have wide applications such as miniature inertial measurement units, biochemical analysis on a chip, arrayed micromanipulation of parts, optical displays and micro-probes for neural recording. The current and increasing success of MEMS stems from its promise of better performance, low manufacturing cost, miniaturization and its capacity for integration with electronic circuits. The MEMS market is conservatively projected to reach between $12 and $14 billion by the year 2000.

The technology trend is towards higher degrees of integration that result in greater capabilities by MEMS products to assess and manipulate their surrounding environment.

Realizing these projections requires that the open problems in design, test, process and package technology be confronted and adequately addressed.

To address adequately the test issues has been the motivation for the creation of this TAC. In general, some existing microelectronics test techniques can be used for testing electrical parts and others are being developed to cope with non-electrical parts of MEMS. However, solutions are needed for MEMS fault modeling, fault simulation, test signal generation and design for test problems, starting from the background on similar digital and analog testing issues, and on MEMS design.

A panel has been held at the 1998 VLSI Test Symposium. A few papers have been presented at previous issues of ITC and ED&TC. In 1998, ITC has 2 sessions dedicated to MEMS Testing, including a MEMS tutorial. The Design, Test and Microfabrication of MEMS/MOEMS Symposium to be held in 1999 will include test issues.

Conferences and symposia

19th IEEE Workshop on Silicon Errors in Logic – System Effects (SELSE) 2023

Paper registration: December 23, 2022
Paper submission: January 9, 2023

IEEE European Test Symposium 2023
Title+Abstract: December 9, 2022
Paper: December 16, 2022

IEEE VLSI Test Symposium 2023
Title+Abstract: November 5, 2022
Paper: November 11, 2022

DATE 2023
Title+abstract: September 18, 2022 (AoE)
Paper: September 25, 2022 (AoE)

IEEE Asian Test Symposium 2022
Abstract & Full Paper Submission Deadline: July 1st, 2022 (AoE)

ITC India 2022
Abstract & Full Paper Submission Deadline: May 9th, 2022

IOLTS 2022
Paper submission: May 10, 2022

LATS 2022
Title+abstract: May 6, 2022
Paper: May 13, 2022